most citedM-center in low-energy electron irradiated 4H-SiC

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cond-mat.mtrl-sci2022★ 14 cited

M-center in low-energy electron irradiated 4H-SiC

Tihomir Knezevic, Amira Hadzipasic, Takeshi Ohshima +2

We report on the low-energy electron irradiated 4H-SiC material studied by means of deep-level transient spectroscopy (DLTS) and Laplace-DLTS. Electron irradiation has introduced t…