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SiN nanobeam optomechanical crystals
Karen E. Grutter, Marcelo Davanco, Kartik Srinivasan
The development of SiN nanobeam optomechanical crystals is reviewed. These structures consist of a 350 nm thick, 700 nm wide doubly-clamped SiN nanobeam that is per…
Phonon counting and intensity interferometry of a nanomechanical resonator
Justin D. Cohen, Sean M. Meenehan, Gregory S. MacCabe +5
Using an optical probe along with single photon detection we have performed effective phonon counting measurements of the acoustic emission and absorption processes in a nanomechan…
Linear and nonlinear capacitive coupling of electro-opto-mechanical photonic crystal cavities
Alessandro Pitanti, Johannes M. Fink, Amir H. Safavi-Naeini +4
We fabricate and characterize a microscale silicon electro-opto-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiati…
Thermalization properties at mK temperatures of a nanoscale optomechanical resonator with acoustic-bandgap shield
Sean M. Meenehan, Justin D. Cohen, Simon Groeblacher +4
Optical measurements of a nanoscale silicon optomechanical crystal cavity with a mechanical resonance frequency of 3.6GHz are performed at sub-kelvin temperatures. We infer optical…
Two-dimensional phononic-photonic bandgap optomechanical crystal cavity
Amir H. Safavi-Naeini, Jeff T. Hill, Sean Meenehan +3
We present the fabrication and characterization of an artificial crystal structure formed from a thin-film of silicon which has a full phononic bandgap for microwave X-band phonons…