Abdulkarim Hariri

activity

20242026

collaborators

Showing physics.opticsShow all

2 papers · 1 filter

physics.optics2025

Ultralow-loss photonic integrated chips on 8-inch anomalous-dispersion Si $_{3}$ N $_{4}$ -SiO $_{2}$ -Si Wafer

Shuai Liu, Matthew W. Puckett, Jianfeng Wu +3

We report the fabrication of 8-inch crack-free, dispersion-engineered Si $_{3}$ N $_{4}$ -SiO $_{2}$ -Si wafers fully compatible with industrial foundry silicon photonics fabrication lines. By…

physics.optics2024

Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching

Shuai Liu, Yuheng Zhang, Abdulkarim Hariri +2

Silicon nitride (Si $_{3}$ N $_{4}$ ) photonic integrated circuits (PICs) have emerged as a versatile platform for a wide range of applications, such as nonlinear optics, narrow-linewidth…

Ultralow-loss photonic integrated chips on 8-inch anomalous-dispersion Si3​N4​-SiO2​-Si Wafer

Fabrication of Ultra-Low-Loss, Dispersion-Engineered Silicon Nitride Photonic Integrated Circuits via Silicon Hardmask Etching

Ultralow-loss photonic integrated chips on 8-inch anomalous-dispersion Si $_{3}$ N $_{4}$ -SiO $_{2}$ -Si Wafer