most citedInert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon

5 citations · 5 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2023★ 5 cited

Inert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon

Nian-Ke Chen, Yu-Chen Gao, Ji-Hong Zhao +5

Inert (noble gas) elements are extremely inactive to surrounding chemical environment and are frequently employed as protective gas in various semiconductor fabrication processes.…