most citedInert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon

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cond-mat.mtrl-sci2023★ 5 cited

Inert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon

Nian-Ke Chen, Yu-Chen Gao, Ji-Hong Zhao +5

Inert (noble gas) elements are extremely inactive to surrounding chemical environment and are frequently employed as protective gas in various semiconductor fabrication processes.…