most citedTemperature dependence of contact resistance of Au-Ti-Pd2Si-n+-Si ohmic contacts

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cond-mat.mtrl-sci2011★ 1 cited

Temperature dependence of contact resistance of Au-Ti-Pd2Si-n+-Si ohmic contacts

A. E. Belyaev, N. S. Boltovets, R. V. Konakova +3

We investigated temperature dependence of contact resistance of an Au-Ti-Pd2Si ohmic contact to heavily doped n+-Si. The contact resistance increases with temperature owing to cond…