180 citations · 627 across the 19 of their papers we have counts for
3 papers · 2 filters
Optical absorption of silicon nanowires
Tao Xu, Yannick Lambert, Christophe Krzeminski +6
We report on simulations and measurements of the optical absorption of silicon nanowires (NWs) versus their diameter. We first address the simulation of the optical absorption base…
Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release
Vikram Passi, Ulf Sodervall, Bengt Nilsson +6
Damages are created in a sacrificial layer of silicon dioxide by ion implantation to enhance the etch rate of silicon-dioxide in liquid and vapor phase hydrofluoric acid. The etch…
Understanding of the Retarded Oxidation Effects in Silicon Nanostructures
C. Krzeminski, X. -L. Han, G. Larrieu
In-depth understanding of the retarded oxidation phenomenon observed during the oxidation of silicon nanostructures is proposed. The wet thermal oxidation of various silicon nanost…