180 citations · 627 across the 19 of their papers we have counts for
10 papers · 1 filter
Optical absorption of silicon nanowires
Tao Xu, Yannick Lambert, Christophe Krzeminski +6
We report on simulations and measurements of the optical absorption of silicon nanowires (NWs) versus their diameter. We first address the simulation of the optical absorption base…
Anisotropic Vapor HF etching of silicon dioxide for Si microstructure release
Vikram Passi, Ulf Sodervall, Bengt Nilsson +6
Damages are created in a sacrificial layer of silicon dioxide by ion implantation to enhance the etch rate of silicon-dioxide in liquid and vapor phase hydrofluoric acid. The etch…
Understanding of the Retarded Oxidation Effects in Silicon Nanostructures
C. Krzeminski, X. -L. Han, G. Larrieu
In-depth understanding of the retarded oxidation phenomenon observed during the oxidation of silicon nanostructures is proposed. The wet thermal oxidation of various silicon nanost…
Energy-band engineering for improved charge retention in fully self-aligned double floating-gate single-electron memories
Xiaohui Tang, Christophe Krzeminski, Aurélien Lecavelier des Etangs-Levallois +9
We present a new fully self-aligned single-electron memory with a single pair of nano floating gates, made of different materials (Si and Ge). The energy barrier that prevents stor…
A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum
Vikram Passi, Aurélie Lecestre, Christophe Krzeminski +3
Primarily used as etch mask, single layer hydrogen silsesquioxane has never been investigated for lift-off technique. In this article, we propose a new technique where a single lay…
Optimisation and Simulation of an Alternative nano-flash Memory: the SASEM device
Christophe Krzeminski, Emmanuel Dubois, Xiaohui Tang +3
Process simulation are performed in order to simulate the full fabrication process of an alternative nano-flash memory in order to optimise it and to improve the understanding of t…