Gate Stack Dielectric Degradation of Rare-Earth Oxides Grown on High Mobility Ge Substrates

Md. Shahinur Rahman, Evangelos K. Evangelou, Nikos Konofaos +1

We report on the dielectric degradation of Rare-Earth Oxides (REOs), when used as interfacial buffer layers together with HfO2 high-k films (REOs/HfO2) on high mobility Ge substrat…