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physics.ins-det2015★ 7 cited
Alignment free characterization of 2D gratings
Morten Hannibal Madsen, Pierre Boher, Poul-Erik Hansen +1
Fast characterization of 2-dimensional gratings is demonstrated using a Fourier lens optical system and a differential optimization algorithm. It is shown that both the grating spe…
physics.ins-det2015★ 29 cited
Imaging Scatterometry
Morten Hannibal Madsen, Poul-Erik Hansen
We present an optical metrology system for characterization of topography of micro/nano-structures on a surface or embedded in a semi-transparent material. Based on the principles…