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physics.optics2019★ 46 cited

Observation of a Correlation Between Internal friction and Urbach Energy in Amorphous Oxides Thin Films

Alex Amato, Silvana Terreni, Massimo Granata +5

We have investigated by spectroscopic ellipsometry (SE, 190-1700 nm) the optical properties of uniform, amorphous thin films of Ta2O5 and Nb2O5 as deposited and after annealing, an…