8 citations · 12 across the 2 of their papers we have counts for
2 papers
physics.app-ph2023★ 4 cited
Study of Surface Damage in Silicon by Irradiation with Focused Rubidium Ions
S. Xu, Y. Li, M. A. Verheijen +2
Cold atom ion sources have been developed and commercialized as alternative sources for focused ion beams (FIB). So far, applications and related research have not been widely repo…
physics.app-ph2022★ 8 cited
Rubidium Focused Ion Beam Induced Platinum Deposition
Yang Li, Sheng Xu, Meltem Sezen +2
This work presents characterization of focused ion beam induced deposition (FIBID) of platinum using both rubidium and gallium ions. Under similar beam energies, 8.5 keV for Rb…