50 citations · 57 across the 3 of their papers we have counts for
3 papers
Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate
Padmalochan Panda, Soumyadip Chatterjee, Siddharth Tallur +1
This work reports on the fabrication and characterization of an Au/ZnO/Pt-based high-overtone bulk acoustic resonator (HBAR) on SiC substrates. We evaluate its microwave characteri…
Spectroscopic Ellipsometry investigation on anisotropic optical properties of sputtered AlN films
Padmalochan Panda, R. Ramaseshan, S. Tripura Sundari +1
We report the uniaxial anisotropic optical constants of Wurtzite type AlN films deposited on Si (100) substrate using DC reactive magnetron sputtering as a function of growth tempe…
Reduction of residual stress in AlN thin Films synthesized by magnetron sputtering technique
Padmalochan Panda, R. Ramaseshan, N Ravi +5
We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function o…