Microwave characterization of tantalum superconducting resonators on silicon substrate with niobium buffer layer

Yoshiro Urade, Kay Yakushiji, Manabu Tsujimoto +4

Tantalum thin films sputtered on unheated silicon substrates are characterized with microwaves at around 10 GHz in a 10 mK environment. We show that the phase of tantalum with a bo…