Investigation of the deposition of $\alpha$-tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit

Haolin Jia, Boyi Zhou, Tao Wang +6

Polycrystalline α-tantalum (110) films deposited on c-plane sapphire substrate by sputtering are used in superconducting qubits nowadays. However, these films always occasionally f…