119 citations · 126 across the 3 of their papers we have counts for
3 papers
physics.optics2023★ 119 cited
Super stealth dicing of transparent solids with nanometric precision
Zhen-Ze Li, Hua Fan, Lei Wang +9
Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant process in manufacturing industries, encompassing a wide range of applications from flat dis…
cond-mat.mtrl-sci2023★ 5 cited
Inert gas as electronic impurity in semiconductors: The case for active infrared absorption in silicon
Nian-Ke Chen, Yu-Chen Gao, Ji-Hong Zhao +5
Inert (noble gas) elements are extremely inactive to surrounding chemical environment and are frequently employed as protective gas in various semiconductor fabrication processes.…
physics.optics2021★ 2 cited
Polarization-Orthogonal Nondegenerate Plasmonic Higher-Order Topological States
Yuanzhen Li, Su Xu, Zijian Zhang +10
Photonic topological states, providing light-manipulation approaches in robust manners, have attracted intense attention. Connecting photonic topological states with far-field degr…