J. Speck

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physics.app-ph2026

Evidence of Micron-Scale Ion Damage in (010), (110), and (011) $I^^{2} - G a_{2} O_{3}$ Epitaxial Layers

Carl Peterson, Chinmoy Nath Saha, Yizheng Liu +2

We report on the experimental observation of up to 11.5 $I^¼ m$ deep charge depletion in (010), (110), and (011) $I^^{2} - G a_{2} O_{3}$ epitaxial layers due to ion damage from sputtering and i…

physics.app-ph2025

kV-Class Lateral NiOx/GaN Super-Heterojunction Diode via Ammonia Molecular Beam Epitaxy (NH3-MBE)

Yizheng Liu, Zachary J. Biegler, Ashley E. Wissel-Garcia +2

This work reports the demonstration of lateral p-NiOx/p-GaN/n-GaN-based super-heterojunction (SHJ) diodes using p-GaN with additional sputtered p-type nickel oxide (NiOx) layers to…

Evidence of Micron-Scale Ion Damage in (010), (110), and (011) I^2−Ga2​O3​ Epitaxial Layers

kV-Class Lateral NiOx/GaN Super-Heterojunction Diode via Ammonia Molecular Beam Epitaxy (NH3-MBE)

Evidence of Micron-Scale Ion Damage in (010), (110), and (011) $I^^{2} - G a_{2} O_{3}$ Epitaxial Layers