214 citations · 334 across the 13 of their papers we have counts for
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Origin of the energetic ions at the substrate generated during high power pulsed magnetron sputtering of titanium
Christian Maszl, Wolfgang Breilmann, Jan Benedikt +1
HiPIMS plasmas generate energetic metal ions at the substrate as a major difference to conventional direct current magnetron sputtering. The origin of these ions is still an open i…
Particle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatment
Carles Corbella, Simon Grosse-Kreul, Oliver Kreiter +3
A beam experiment is presented to study heterogeneous reactions relevant to plasma-surface interactions. Atom and ion beams are focused onto the sample to expose it to quantified b…
Time resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride
Felix Mitschker, Marina Prenzel, Jan Benedikt +2
The growth rate during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitride is measured with a temporal resolution of up to 25 us using a rotating shutter c…
Bimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputtering
Marina Prenzel, Annika Kortmann, Adrian Stein +3
Al2O3 thin films have been deposited at substrate temperatures between 500°C to 600°C by reactive magnetron sputtering using an additional arbitrary substrate bias to tailor the en…