11 citations · 21 across the 3 of their papers we have counts for
1 paper · 1 filter
Lianfeng Zhao, Zhen Tan, Jing Wang +1
GaSb p-channel MOSFETs with an atomic layer deposited Al2O3 gate dielectric and a self-aligned Si implanted source/drain are demonstrated. Thermal anneal conditions are optimized f…