Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures

Mark W. Horn, Matthew D. Pickett, Russell Messier +1

The combination of large thickness ($>3$ $\mu$m), large--area uniformity (75 mm diameter), high growth rate (up to 0.4 $\mu$m/min) in assemblies of complex--shaped nanowires on lithogr…