4 papers
Hybrid simulation of the energy cost of O(D) and O(P) generation in a capacitive Ar/O discharge driven by sawtooth-type voltage waveforms
Jun-Xi Guo, Wan Dong, Yuan-Hong Song
Low-pressure radio-frequency capacitively coupled plasmas operated in Ar/O gas mixtures are widely adopted in critical semiconductor manufacturing processes. O(P) and O($^1…
The effect of surface quenching coefficients of and on capacitively coupled / discharge: A global/equivalent circuit model study
Wan Dong, Yi Wang, Yi-Fan Zhang +1
Capacitively coupled discharges operated in mixtures of and are extensively utilized in plasma etching and deposition processes due to the oxidative properties and precu…
Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms
Wan Dong, Liu-Qin Song, Yi-Fan Zhang +3
The electron dynamics and SiO2 etching profile evolution in capacitively coupled Ar/CHF3 plasmas driven by sawtooth-waveforms are investigated based on a one-dimensional fluid/Mont…
Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms
Wan Dong, Zhuo-Yao Gao, Li Wang +5
One dimensional fluid/electron Monte Carlo simulations of capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms are performed as a function of the number of…