93 citations · 217 across the 9 of their papers we have counts for
Showing physics.ins-detShow all
2 papers · 1 filter
physics.ins-det2023★ 1 cited
Roadmap for focused ion beam technologies
Katja Höflich, Gerhard Hobler, Frances I. Allen +29
The focused ion beam (FIB) is a powerful tool for the fabrication, modification and characterization of materials down to the nanoscale. Starting with the gallium FIB, which was or…
physics.ins-det2020★ 11 cited
Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
Lothar Bischoff, Nico Klingner, Paul Mazarov +2
Focused Ion Beam (FIB) processing has been established as a well-suited and promising technique in R&D in nearly all fields of nanotechnology for patterning and prototyping on the…