Optical Point-Spread Function via Defocus Phase Retrieval in Scanning Electron Microscopy

Surya Kamal, Kevin Mogere Nyaburi, Richard K. Hailstone

The point-spread function of the probe-forming optics ($PS{F}_{optics}$) is reported in an uncorrected (without multipole correctors) scanning electron microscope (SEM). In an SEM, i…