22 citations · 23 across the 2 of their papers we have counts for
2 papers
physics.app-ph2024★ 1 cited
Multiparameter admittance spectroscopy for investigating defects in MoS thin film MOSFETs
Eros Reato, Ardeshir Esteki, Benny Ku +4
A method for assessing the quality of electronic material properties of thin-film metal oxide semiconductor field-effect transistors (MOSFETs) is presented. By investigating sample…
physics.app-ph2022★ 22 cited
AFM-based Hamaker Constant Determination with Blind Tip Reconstruction
Benny Ku, Ferdinandus van de Wetering, Jens Bolten +3
Particle contamination of extreme ultraviolet (EUV) photomasks is one of the numerous challenges in nanoscale semiconductor fabrication, since it can lead to systematic device fail…