most citedElectron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode

21 citations · 59 across the 4 of their papers we have counts for

collaborators
Showing eess.SYShow all

1 paper · 1 filter

eess.SY2026

Parameter-interval estimation for cooperative reactive sputtering processes

Fabian Schneider, Christian Wölfel

Reactive sputtering is a plasma-based technique to deposit a thin film on a substrate. This contribution presents a novel parameter-interval estimation method for a well-establishe…