most citedDavies ENDOR revisited: Enhanced sensitivity and nuclear spin relaxation

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cond-mat.mtrl-sci2005

Electrical activation and electron spin coherence of ultra low dose antimony implants in silicon

T. Schenkel, A. M. Tyryshkin, R. de Sousa +7

We implanted ultra low doses (2x10^11 cm-2) of 121Sb ions into isotopically enriched 28Si and find high degrees of electrical activation and low levels of dopant diffusion after ra…