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cond-mat.mtrl-sci2010
Electrically Detected Magnetic Resonance Applied to the Study of Near Surface Electron Donors in Silicon
W. D. Hutchison, P. G. Spizzirri, F. Hoehne +1
Electrically detected magnetic resonance (EDMR) is applied to mm size devices with implanted leads and a 50 micron square gap laid down on bulk phosphorus doped silicon. Devices wi…
cond-mat.mtrl-sci2010★ 1 cited
ESR studies of ion implanted phosphorus donors near the Si-SiO2 interface
Paul G. Spizzirri, Wayne D. Hutchison, Nikolas Stavrias +4
This work reports an ESR study of low energy, low fluence phosphorus ion implantation into silicon in order to observe the activation of phosphorus donors placed in close proximity…