most citedA versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays

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q-bio.QM2006★ 29 cited

A versatile maskless microscope projection photolithography system and its application in light-directed fabrication of DNA microarrays

Thomas Naiser, Timo Mai, Wolfgang Michel +1

We present a maskless microscope projection lithography system (MPLS), in which photomasks have been replaced by a Digital Micromirror Device type spatial light modulator (DMD, Tex…