Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes

Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10

We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter hi…