236 citations · 515 across the 16 of their papers we have counts for
Showing 2014 · physics.plasm-phShow all
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physics.plasm-ph2014★ 10 cited
Plasma probe characteristics in low density hydrogen pulsed plasmas
D. I. Astakhov, W. J. Goedheer, C. J. Lee +6
Probe theories are only applicable in the regime where the probe's perturbation of the plasma can be neglected. However, it is not always possible to know, a priori, that a particu…
physics.plasm-ph2014★ 25 cited
Discharge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processes
A Dolgov, O Yakushev, A Abrikosov +4
An experimental setup that directly reproduces Extreme UV-lithography relevant conditions for detailed component exposure tests is described. The EUV setup includes a pulsed plasma…