236 citations · 515 across the 16 of their papers we have counts for
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cond-mat.mtrl-sci2014★ 236 cited
Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source
A Dolgov, D Lopaev, C J Lee +4
Molecular contamination of a grazing incidence collector for extreme ultraviolet (EUV) lithography was experimentally studied. A carbon film was found to have grown under irradiati…
cond-mat.mtrl-sci2014★ 13 cited
Graphene defect formation by extreme ultraviolet generated photoelectrons
A. Gao, C. J. Lee, F. Bijkerk
We have studied the effect of photoelectrons on defect formation in graphene during extreme ultraviolet (EUV) irradiation. Assuming the major role of these low energy electrons, we…