most citedObservation of femto-joule optical bistability involving Fano resonances in high-Q/Vm silicon photonic crystal nanocavities

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cond-mat.mtrl-sci2007★ 42 cited

Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition

Xiaodong Yang, Charlton J. Chen, Chad A. Husko +1

We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using a self-limiting atomic layer deposition technique. Control of reson…