481 citations · 2k across the 23 of their papers we have counts for
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Aluminum nitride as a new material for chip-scale optomechanics and nonlinear optics
Chi Xiong, Wolfram H. P. Pernice, Xiankai Sun +3
Silicon photonics has offered a versatile platform for the recent development of integrated optomechanical circuits. However, silicon is limited to wavelengths above 1100 nm and do…
Second harmonic generation in phase matched aluminum nitride waveguides
W. H. P. Pernice, C. Xiong, C. Schuck +1
We demonstrate second order optical nonlinearity in aluminum nitride on insulator substrates. Using sputter-deposited aluminum nitride thin films we realize nanophotonic waveguides…
High-Q aluminum nitride photonic crystal nanobeam cavities
W. H. P. Pernice, C. Xiong, C. Schuck +1
We demonstrate high optical quality factors in aluminum nitride (AlN) photonic crystal nanobeam cavities. Suspended AlN photonic crystal nanobeams are fabricated in sputter-deposit…