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cond-mat.mtrl-sci2017
Surface morphology and superconductivity of Nb thin films by biased target ion beam deposition
Salinporn Kittiwatanakul, Nattawut Anuniwat, Nam Dao +2
One of many challenges for niobium (Nb) based superconducting devices is the improvement over the surface morphology and superconducting properties as well as the reduction of defe…
cond-mat.mtrl-sci2009
Target bias voltage effect on properties of magnetic tunnel junctions by biased target ion beam deposition
Wei Chen, Dao N. H. Nam, Jiwei Lu +2
Magnetic tunnel junctions (MTJ) with AlOx barrier were fabricated by a deposition tool called Biased Target Ion Beam Deposition (BTIBD) using low energy ion source (0-50 eV) and vo…