collaborators

1 paper

cond-mat.mtrl-sci2009

Target bias voltage effect on properties of magnetic tunnel junctions by biased target ion beam deposition

Wei Chen, Dao N. H. Nam, Jiwei Lu +2

Magnetic tunnel junctions (MTJ) with AlOx barrier were fabricated by a deposition tool called Biased Target Ion Beam Deposition (BTIBD) using low energy ion source (0-50 eV) and vo…