Isotopic enrichment of silicon by high fluence ${}^{28}$Si${}^{-}$ ion implantation

D. Holmes, B. C. Johnson, C. Chua +8

Spins in the `semiconductor vacuum' of silicon-28 (${}^{28}$Si) are suitable qubit candidates due to their long coherence times. An isotopically purified substrate of ${}^{28}$Si is re…