2 papers
physics.data-an2026
Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing
Ronald G. Dixson, Adam L. Pintar, R. Joseph. Kline +4
Hybrid metrology for semiconductor manufacturing is on a collision course with dark uncertainty. An IEEE technology roadmap for this venture has targeted a linewidth uncertainty of…
eess.IV2023
Limited-Angle Tomography Reconstruction via Deep End-To-End Learning on Synthetic Data
Thomas Germer, Jan Robine, Sebastian Konietzny +2
Computed tomography (CT) has become an essential part of modern science and medicine. A CT scanner consists of an X-ray source that is spun around an object of interest. On the opp…