Mueller Matrix Decomposition for a General Rotating Compensator Ellipsometer

Abstract

This work develops a Mueller matrix decomposition that factors a nondepolarizing Mueller matrix $M$ into three components $M=T_{1}D{T}_2$, where the elements $D$, which correspond to a diagonal Jones matrix, are separated from rotations and circular diattenuation $T_1,T_2$. This decomposition is employed to calibrate a prototype reflective rotating-compensator ellipsometer designed to operate using extreme ultraviolet (EUV) radiation. This decomposition allows for the measurement of the full Mueller matrix of a sample without full knowledge of the compensators or the source polarization, while allowing for significant diattenuation and retardance for the optics. A generalization of the decomposition is developed for depolarizing Mueller matrices, and the technique is tested on reflection data collected on an Au mirror at $266$ nm.