1 citations · 1 across the 2 of their papers we have counts for
2 papers
physics.plasm-ph2024
Electron dynamics and SiO2 etching profile evolution in capacitive Ar/CHF3 discharges driven by sawtooth-tailored voltage waveforms
Wan Dong, Liu-Qin Song, Yi-Fan Zhang +3
The electron dynamics and SiO2 etching profile evolution in capacitively coupled Ar/CHF3 plasmas driven by sawtooth-waveforms are investigated based on a one-dimensional fluid/Mont…
physics.plasm-ph2024★ 1 cited
Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms
Wan Dong, Zhuo-Yao Gao, Li Wang +5
One dimensional fluid/electron Monte Carlo simulations of capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms are performed as a function of the number of…