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cond-mat.mtrl-sci2025★ 2 cited
Chemical Vapor Deposition of Nitrides by Carbon-free Brominated Precursors
Stefano Leone, Teresa Duarte, Hanspeter Menner +6
The epitaxial growth of group 13-nitride semiconductors (GaN, AlN, and AlGaN alloys) for the mass production and fabrication of high-frequency and high-power devices relies on meta…
cond-mat.mtrl-sci2025
Delta-Doped Diamond via in-situ Plasma-Distance Control
Philip Schätzle, Felix Hoffmann, Sven Mägdefessel +3
We present an approach for the CVD growth of diamond, where the sample is placed in a defined distance from the reactor baseplate, to which the plasma couples. We observe two previ…