most citedSputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm Loss

7 citations · 11 across the 4 of their papers we have counts for

collaborators

5 papers

cond-mat.mtrl-sci2025★ 2 cited

Chemical Vapor Deposition of Nitrides by Carbon-free Brominated Precursors

Stefano Leone, Teresa Duarte, Hanspeter Menner +6

The epitaxial growth of group 13-nitride semiconductors (GaN, AlN, and AlGaN alloys) for the mass production and fabrication of high-frequency and high-power devices relies on meta…

cond-mat.mtrl-sci2025

Delta-Doped Diamond via in-situ Plasma-Distance Control

Philip Schätzle, Felix Hoffmann, Sven Mägdefessel +3

We present an approach for the CVD growth of diamond, where the sample is placed in a defined distance from the reactor baseplate, to which the plasma couples. We observe two previ…

physics.ins-det2025★ 1 cited

Observation of narrow-band radiation from a boron-doped diamond superlattice with an 855 MeV electron beam

Hartmut Backe, José Baruchel, Simon Bénichou +8

We report the first observation of narrow band 1.3 MeV radiation from a crystalline diamond micro-undulator. A diamond superlattice was grown with a periodical varying boron do…

physics.app-ph2024★ 1 cited

Improved Leakage Currents and Polarity Control through Oxygen Incorporation in Ferroelectric Al0.73Sc0.27N Thin Films

Md Redwanul Islam, Niklas Wolff, Georg Schönweger +8

This article examines systematic oxygen (O)-incorporation to reduce total leakage currents in sputtered wurtzite-type ferroelectric Al0.73Sc0.27N thin films, along with its impact…

physics.optics2024★ 7 cited

Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm Loss

Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian +4

We report the fabrication and characterization of photonic waveguides from sputtered aluminum nitride (AlN). The AlN films were deposited on 6" silicon substrates with a 3 m bur…