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On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces
M. Farahani, T. Kozák, A. D. Pajdarová +2
High-power impulse magnetron sputtering (HiPIMS) delivers a high target power in short pulses, enhancing the ionization and energy of sputtered atoms and providing thus more possib…
Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
M. Farahani, T. Kozák, A. D. Pajdarová +1
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons…
On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge
Andrea Dagmar Pajdarová, Tomáš Kozák, Tomáš Tölg +1
Time-resolved Langmuir probe diagnostics at the discharge centerline and at three distances from the target (35mm, 60mm, and 100mm) was carried out during long positive voltage pul…