3 papers
physics.plasm-ph2024
On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces
M. Farahani, T. Kozák, A. D. Pajdarová +2
High-power impulse magnetron sputtering (HiPIMS) delivers a high target power in short pulses, enhancing the ionization and energy of sputtered atoms and providing thus more possib…
physics.plasm-ph2024
Effect of magnetic field configuration on double layer formation and reverse discharge ignition in bipolar HiPIMS
M. Farahani, T. Kozák, A. D. Pajdarová +1
The reverse discharge (RD) phenomenon in bipolar HiPIMS has been observed when a sufficiently long positive pulse is applied to the magnetron. Due to the magnetic field, electrons…
physics.plasm-ph2024
On double-layer and reverse discharge creation during long positive voltage pulses in a bipolar HiPIMS discharge
Andrea Dagmar Pajdarová, Tomáš Kozák, Tomáš Tölg +1
Time-resolved Langmuir probe diagnostics at the discharge centerline and at three distances from the target (35mm, 60mm, and 100mm) was carried out during long positive voltage pul…