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physics.optics2024★ 7 cited
Sputtered Aluminum Nitride Waveguides for the Telecommunication Spectrum with less than 0.16 dB/cm Loss
Radhakant Singh, Mohit Raghuwanshi, Balasubramanian Sundarapandian +4
We report the fabrication and characterization of photonic waveguides from sputtered aluminum nitride (AlN). The AlN films were deposited on 6" silicon substrates with a 3 m bur…
physics.optics2023★ 17 cited
Graphene thermal infrared emitters integrated into silicon photonic waveguides
Nour Negm, Sarah Zayouna, Shayan Parhizkar +11
Cost-efficient and easily integrable broadband mid-infrared (mid-IR) sources would significantly enhance the application space of photonic integrated circuits (PICs). Thermal incan…