most citedChip-scale nanofabrication of single spins and spin arrays in diamond

313 citations · 313 across the 1 of their papers we have counts for

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1 paper

cond-mat.mes-hall2010★ 313 cited

Chip-scale nanofabrication of single spins and spin arrays in diamond

David M. Toyli, Christoph D. Weis, Gregory D. Fuchs +2

We demonstrate a technique to nanofabricate nitrogen vacancy (NV) centers in diamond based on broad-beam nitrogen implantation through apertures in electron beam lithography resist…