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cond-mat.mes-hall2023
Interfacial Fe segregation and its influence on magnetic properties of CoFeB/MgFeO multilayers
Tomohiro Ichinose, Tatsuya Yamamoto, Takayuki Nozaki +3
We investigated the effect of Fe segregated from partially Fe-substituted MgO (MgFeO) on the magnetic properties of CoFeB/MgFeO multilayers. X-ray photoelectron spectroscopy (XPS)…
cond-mat.mes-hall2023
Cryogenic temperature deposition of high-performance CoFeB/MgO/CoFeB magnetic tunnel junctions on 300 mm wafers
Tomohiro Ichinose, Tatsuya Yamamoto, Takayuki Nozaki +4
We developed a cryogenic temperature deposition process for high-performance CoFeB/MgO/CoFeB magnetic tunnel junctions (MTJs) on 300 mm thermally oxidized silicon wafers. The effec…