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physics.optics2025
Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry
Brendan McBennett, Michael Tanksalvala, Emma E. Nelson +10
Dynamic scattering and imaging with coherent, ultrafast, extreme ultraviolet (EUV) light sources can resolve charge, phonon and spin processes on their intrinsic length and time sc…
physics.optics2025★ 1 cited
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Clay Klein, Nicholas W. Jenkins, Yunzhe Shao +5
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and re…