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physics.optics2025★ 1 cited
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Clay Klein, Nicholas W. Jenkins, Yunzhe Shao +5
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and re…
physics.optics2024★ 134 cited
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…