134 citations · 137 across the 3 of their papers we have counts for
3 papers
Coherent EUV scatterometry of 2D periodic structure profiles with mathematically optimal experimental design
Clay Klein, Nicholas W. Jenkins, Yunzhe Shao +5
Extreme ultraviolet (EUV) scatterometry is an increasingly important metrology that can measure critical parameters of periodic nanostructured materials in a fast, accurate, and re…
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…
High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
Bin Wang, Nathan J. Brooks, Peter C. Johnsen +6
Ptychographic Coherent Diffractive Imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-formin…