Ultracompact 4H-silicon carbide optomechanical resonator with $f_m\cdot Q_m$ exceeding $10^{13}$ Hz

Yuncong Liu, Wenhan Sun, Hamed Abiri +2

Silicon carbide (SiC) has great potential for optomechanical applications due to its outstanding optical and mechanical properties. However, challenges associated with SiC nanofabr…